A tailored product range for advanced manufacturing equipment

Our products boost productivity and reliability across semiconductor manufacturing—from power supplies and interfaces to PCBs, control panels, and devices. We offer human presence detection, flow sensors for vacuum and gas monitoring, and both contact and contactless technologies for object detection. The product range incldes both mechanical contact technology (microswitches) and optical technology (photomicrosensors) for object detection within equipment.

_{Click on the hotspots in the 360° view below for more information}

Canopy

Semiconductor Manufacturing Equipment

Product

Off

Labels

1

POWER SUPPLY, MEASUREMENT, MOTORS & SOLENOIDS
2

CONTROL PCBs
3

INSIDE OF THE BOARD
4

COVER
5

CONTROL PANEL
6

HUMAN PRESENCE DETECTION
7

INTERNAL DEVICES

POWER SUPPLY, MEASUREMENT, MOTORS & SOLENOIDS
- Device power on-off
- Controlling measurement circuits and drives
Power relays
G2RL
G6B
G7EB-E2
G9KA-E
CONTROL PCBs
- Switch test signals, switch power circuit
Signal relays
G6K
G6J
G6S
MOSFET relays
G3VM
High-frequency relay
G6K-RF
- Settings, I/O signal switching
DIP switches
A6TN/A6SN
INSIDE OF THE BOARD
- Signal and power supply connection
Input/Output PCB connectors:
XW4M
XW4N

MIL connectors
XG2/4/5

FPC/FFC connectors
XF2M/XF3M
COVER
- Open-close status detection
Basic switches
D3V/SS/D2F
Sealed ultra Subminiature basic switches
D2HW/D2EW/D2EW-R
- Open-close status detection embedded in device
- Object position/direction detection
Photomicrosensors

EE-SX

Light convergent/diffuse reflective sensor

B5W-LB/DB
CONTROL PANEL
- Interface for device control
Tactile switches
B3SL/B3W/B3FS/B3FS key tops
Push-button switches
A16/A22/A30
HUMAN PRESENCE DETECTION

Human Vision Components:
B5T HVC Top View for Human Body Detection, including OKAO software

B5T HVC Human Body Detection wearing clean suit, including OKAO software
INTERNAL DEVICES
Micro Pressure Sensor
E8Y-L (NEW!)
- Nitrogen gas flow control
MEMS flow sensors
D6F-A
D6F-P
- Filter vicinity
- Clogged filter detection
MEMS flow sensors
D6F-V
D6F-W
D6F-P
D6F-PL
- Vacuum maintenance in process chamber
- Abnormalities in exhaust gas detection